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產品詳情
Ecoplasma-Twin
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Ecoplasma-Twin

SERIES / 系列 Plasma 電漿系列
APPLICABLE / 適用制程 CVD , Etch , Diffusion 適用
EQUIPMENT MODEL / 設備型號 EcoPlasma_Twin
CAPACITY / 處理能力 500slm * 2
Introduction

電漿水洗式尾氣(廢氣)處理機
保護環境是我們每個人的責任

機台類型:電漿水洗式
工藝流程:廢氣預熱處理→渦流電漿高溫裂解(2,000~10,000C°)→水洗可溶解毒氣→水洗降溫排氣
處理氣體:PFCs Gas (CF4SF6NF3...) & N2O....


Plasma & Wet Gas Scrubber for CVD & Matel Etch & PAD Etch

* Variable Plasma Power

     - Lower power 5KW ~ 10KW for NF3

     - 6KW ~ 20KW for N2O

* High DRE for CVD Gas and N2O

     - Low Power, High Surface Discharger : Reinforce Energy Efficiency

     - Plasma Swirl Effect: Improve Gas Mixing by Turbulence

     - High efficiency for N2O gas

* Easy Maintenance

     - Reduce PM Time

* Water Flowing Wall

     - Anti-clogging for Powder, Long PM Time

* De-NOx   

    - Special design for NOx reduction


電漿水洗式尾氣(廢氣)處理機
保護環境是我們每個人的責任

機台類型:電漿水洗式
工藝流程:廢氣預熱處理→渦流電漿高溫裂解(2,000~10,000C°)→水
洗可溶解毒氣→水洗降溫排氣
處理氣體:PFCs & HFCs Gas (CF4SF6NF3...)


Plasma & Wet Gas Scrubber

Variable Plasma Power

- 6KW ~ 20KW

High DRE for PFCs & HFCs Gas

- Low Power, High Surface Discharger : Reinforce Energy Efficiency

- Plasma Swirl Effect: Improve Gas Mixing by Turbulence

- Heat Conductive Lining: Waste Gas Preheating & High Energy Efficiency

EasyMaintenance

- Reduce PM Time

- Long PM period to 3 months