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Product
EcoHeat
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EcoHeat

SERIES / 系列 Thermal 電加熱系列
APPLICABLE / 適用制程 CVD , Diffusion 適用
EQUIPMENT MODEL / 設備型號 EcoHeat-500
CAPACITY / 處理能力 500, 1000slm
Introduction

Heating water washing exhaust gas processor

It is our duty to protect environment.

Equipment type:Heating washing

Process:Pyrolysis exhaust gas by heating high temperature(600~800C°)→Dissolved toxic gas by washing → Water washing cooling and exhausting

Process gas: The waste gas can be pyrolyzed or oxidized and washed by water


Heat & Wet Gas Scrubber

* 2~3 Zone Heater Control

       - Backup Function to Heater Fail

        - LongLife Time Heater

* Anti-clogging & Anti-corrosion

       - AirCurtain on boundary between Heating Chamber & Cooling Chamber   

       - INCONEL600 Material   in Heating Chamber

       - Teflon Coating in Wet Chamber

* EasyMaintenance

       - Reduce PM Time