EP System for Etch process - De-bad smell (Deodorization)
EP System for Diffusion - De-Powder PM2.5 (Dust Removal)
EP System for Central Scubber - Do-Nox
It is our duty to protect environment.
Equipment type：EP System
Process：Water washing waste gas→Corona atomized water attaches soluble or insoluble poisonous gas and particles to the discharge electrode or electrode plate→Rinse it to the sink (Detail process call)
Process Gas：10-1000CMM
