Plasma water washing exhaust gas processor
It is our duty to protect environment.
Equipment tyep：Plasma water washing
Process：Preheated exhaust gas→Pyrolysis vortex plasma (2,000~10,000C°)→Washing dissolved poison gas→Water washing cooling and exhausting
Process gas：PFCs Gas (CF4、SF6、NF3...) & N2O....
Plasma & Wet Gas Scrubber for CVD & Matel Etch & PAD Etch
* Variable Plasma Power
- Lower power 5KW ~ 10KW for NF3
- 6KW ~ 20KW for N2O
* High DRE for CVD Gas and N2O
- Low Power, High Surface Discharger : Reinforce Energy Efficiency
- Plasma Swirl Effect: Improve Gas Mixing by Turbulence
- High efficiency for N2O gas
* Easy Maintenance
- Reduce PM Time
* Water Flowing Wall
- Anti-clogging for Powder, Long PM Time
* De-NOx
- Special design for NOx reduction
