Plasma & Wet Gas Scrubber for CVD
It is our duty to protect environment.
Equipment tyep：Plasma
* Variable Plasma Power
- Lower power 5KW ~ 10KW for NF3
- 7KW~20KW for N2O
* High DRE for PFCs & HFCs Gas
- Low Power, High SurfaceDischarger : Reinforce Energy Efficiency
- Plasma Swirl Effect: Improve GasMixing by Turbulence
- High efficiency for N2Ogas
* Easy Maintenance
- Reduce PM Time
* Water Flowing Wall
- Anti-clogging for Powder, LongPM Term
* De-NOx
- Special design for NOx reduce
