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Product
EcoBurn
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EcoBurn

SERIES / 系列 Burn 燃燒系列
APPLICABLE / 適用制程 CVD , Etch , Diffusion 適用
EQUIPMENT MODEL / 設備型號 EcoBurn-500
CAPACITY / 處理能力 500slm
Introduction

Combustion washing exhaust gas processor

It is our duty to protect environment

Equipment type: Combustion washing

Process:Natural gas pyrolysis toxic gas→Vortex water flushes chamber, at same time, it keeps the chamber lower than 50 degrees→ Dissolved toxic gas by washing→Water washing cooling and exhausting

處理氣體:PFCs Gas (CF4、SF6、NF3...) .....


Burn & Wet Gas Scrubber

N2 Sleeve Head

    -   Anti-clogging for Powder, Long PM Term

Turbulence 3 Burning Nozzle

    -   Improve Gas Mixing by Turbulence

Water Flowing Wall

   -   Anti-clogging for Powder, Long PM Term

    -   Excellent Thermal Insulation

Easy Maintenance

    -   Reduce PM Time